Cassette or Cassetteless Wafer Handlers:

Designed and manufactured by APET, our fully automated wet process tools are typically integrated with our Marangoni STG Dryers. These wet benches are available cassetteless or with cassette robotic transfer. These are highly reliable wet benches whose process results are second to none. Our Wet Benches are built to USA safety and ergo standards with S2/S8 compliance documentation.

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Wet bench - Fully Automated Solvent System 150mm Cassetteless robotic handler for 1500mm and 200mm wafers Carrierless Wet Station with Surface Tension Gradient drying

Fully Automated Wet Benches

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