Our wide assortment of box washers accommodate cassettes, pods, boxes and FOUPs of all sizes. A typical process includes hot DI spray wash followed by hot N2 blow dry. IR lamp heating is optional. Several models of varying capacities and price points are available. Custom and specialty parts are not a problem; just change the racks.

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Carrousel Type
Box Washers

Drum Type 
Cassette Cleaners

Single Part Type 
Wafer Carrier Cleaners 

New Marangoni
Dryers

IPA Vapor
Dryers

FOUP Washers
Box Cleaners

PhotoMask
Cleaners

Chemical Management

Automated
Wet Benches

Used
Wet Benches

SemiAutomated
Wet Benches

Manual
Wet Benches

DNS WS-820
Controller Upgrade

DI Water : CO2
Sparger Gasifier

Specialty Spin
Cleaners

Quartz Parts
Cleaners

Used Marangoni
Dryers

Used DI Water
Heaters

Metal Lift-Off
Equipment

Single Wafer Spin
Processors