Wafer Carrier Cleaners
(Single Part Type)
WetBenchUSA
The operator loads the wafer carrier, FOUP, or box into the stainless steel process chamber. The chamber has custom fixturing to accommodate the part.
Cleaning and drying is extremely efficient due to the individual small chambers. Parts are high pressure sprayed and spun dry in hot N2. A typical recipe is only 7 minutes.
WetBenchUSA offers a wide variety of wafer carrier cleaners, box washers, and plastic parts cleaners. Below is our single part spin cleaner where each part is washed and dried in individual process chambers.
Drum style spin cleaners are available with one chamber or multiple chambers.
A typical recipe is 15 minutes and cleans roughly 16ea parts/hour per chamber.