Photomask & Reticle Cleaners
Megasonic spray, chemical dispense arm, pencil brush scrub and on board chemical storage are some features in this space efficient single mask unit.
Simple affordable photomask spin cleaners are available for your in house mask cleaning needs. These single substrate spinners can accommodate multiple mask sizes by simple chuck change, or by used a fixed multi mask size chuck.
Reticle Cleaning Equipment
This tool is available with automated mask load/unload or simple manual load/unload.
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N2 Blow Off
Optional Brush
Catch Cup
Backside Rinse
Backside N2
Chem Dispense
Chuck
Shown here is a low cost manually loaded photomask cleaner that is compatible with solvents. The cleaning chamber is equipped with multiple chemistry dispenses. The system has PC based controller with unlimited recipes.
Shown below is an automated spin cleaner suitable for photomask. This system is manufactured for acid based chemistries.
