Specialty Spin Cleaners
We offer a wide variety of single substrate spin cleaners.
As an example, here is a manually loaded spin cleaner that is compatible with solvents. This specific tool is used to dispense solvent on a frame mounted diced wafer as part of a yield improving cleaning process.
Wafers are manually loaded onto the specialty chuck and all else is fully automated. The system uses PC based controls offering Ethernet connectivity, touch screen (or keyboard) control, unlimited recipes, data logging, and report generation.
The process chamber is capable of dispensing multiple chemistries. The dispense can be spray, high pressure, mist, soak, puddle, or any combination. Drying is accomplished by N2 Blow from a dispense arm above and from the chuck below. A contact roller type scrub brush is optional, but not used in this application.
The specialized chuck is designed to prevent undesired chemical wrap around. The frame mount chuck clamps securely and prevents wafer sag.
A 200mm system measures roughly 32.5" X 45". We supply optional chemical cabinets and any fire suppression that may be desired.
These tools use off the shelf components and there are over 100ea similar platforms in the field.