Single Wafer Spin Processing
Advanced semiconductor single wafer spin processing equipment by GZ-Inc.
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1 - Wafer Transfer & Main Controller
2 - AC/DC Power Cabinets
3 - Chamber Control Systems
4 - Plumbing Cabinets
These single wafer spin systems can accommodate up to 8 chambers for throughputs in excess of 300 wafers per hour. Designed for advanced cleaning and etching, this bridge tool (200mm/300mm) is suitable for both FEOL and BEOL cleans.
Available with precision chemical mixing peripheral and optional insitu waste reclaim peripheral that integrates directly.
This systems are make in Korea and supported globally, with trained FSE's right here in the USA. With over 50 tools installed, these systems are FAB proven reliable.
Please contact us for chamber details, specifications, and pricing.