CO2 Gasifier (DI Water Sparger)
for Semiconductor Fabrication
How a CO2 Gasifier Works:
CO2 dissolved in water creates a carbonic acid that dissociates into hydrogen ions and bicarbonate ions.
These ions effectively dissipate static electric charge during the DI rinsing process.
DI Water Spargers are widely used in wafer cleaning applications throughout the semiconductor fabrication industry. By injecting CO2 into the deionized water stream, engineers can effectively neutralize the static charge that is built up by the cleaning process.
Kept unchecked, static electric charge on the wafer (and carrier) would attract particles that negatively impact cleaning and ultimately die yield. Static charge also causes electrical damage to the integrated circuits on the wafers.
Our DI Water CO2 Spargers, also called CO2 Gasifiers, allow process engineers to dial in a desired conductivity to automatically sustain consistent DI Water treatment. Our patented Sparger mixes and manages the CO2 DI "blend" and does so while maintaining a strong steady flow rate. These are FAB proven, reliable, low priced systems with footprints no larger than a typical household microwave oven.
Photos of neatly laid out easy access CO2 Gasifier internals