Semiconductor Box Washers
(Carrousel Type)

Home

WetBenchUSA

Contact Us
Operators load cassettes from the front onto stainless steel racks situated on a carrousel.
The cassettes are sprayed with DI water as they spin through the wash cycle. Drying is accomplished by high speed spin and hot N2 blow. Optional IR Lamps are possible for additional heating.
WetBenchUSA offers a large assortment of box washers suitable for semiconductor FABs and for other industries. Below is the carrousel style box washer illustrating several models of varying capacities.
Inside the Process Chamber
Front View of 8 sided 3 tier 200mm Cassette Cleaner
(Capacity = 24 Parts / Run)

Available Stainless or Plastic
Carrousel is equipped with rotating support columns that securely lock the cassettes or boxes during rotation
Carrousel Type
FOUP Cleaners
Drum Type 
Cassette Cleaners
Single Part Type 
Wafer Carrier Cleaners 
New Marangoni
Dryers
IPA Vapor
Dryers
FOUP Washers
Box Cleaners
PhotoMask
Cleaners
Chemical Management
Automated
Wet Benches
Used
Wet Benches
SemiAutomated
Wet Benches
Manual
Wet Benches
DNS WS-820
Controller Upgrade
DI Water : CO2
Sparger Gasifier
Specialty Spin
Cleaners
Quartz Parts
Cleaners
Used Marangoni
Dryers
Used DI Water
Heaters
Metal Lift-Off
Equipment
Single Wafer Spin
Processors